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1

Fabrication of P-N Junction Diodes Using Homoepitaxially Grown 6H-SiC at Low Temperature by Chemical Vapor Deposition

Shibahara, Kentaro, Kuroda, Naotaka, Nishino, Shigehiro, Matsunami, Hiroyuki

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 439 KB

1987

2

Effects of B18Hx+ and B18Hx dimer ion implantations on crystallinity and retained B dose in silicon

Kawasaki, Yoji, Shibahara, Kentaro

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2012

Language:

english

File:

PDF, 2.25 MB

english, 2012

3

[IEEE 2009 International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2009.06.11-2009.06.12)] 2009 International Workshop on Junction Technology - Anomalous amorphization resistance of Ge against 11B+ implantation

Kentaro Shibahara,, Osada, Kosei

Year:

2009

Language:

english

File:

PDF, 1.17 MB

english, 2009

4

[IEEE 2009 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA) - Hsinchu, Taiwan (2009.04.27-2009.04.29)] 2009 International Symposium on VLSI Technology, Systems, and Applications - Ge shallow junction formation by As implantation and flash lamp annealing

Kosei Osada,, Fukunaga, Tetuya, Kentaro Shibahara,

Year:

2009

Language:

english

File:

PDF, 402 KB

english, 2009

5

Optically Interconnected Kohonen Net for Pattern Recognition

Doi, Takeshi, Namba, Tohru, Uehara, Akihito, Nagata, Makoto, Miyazaki, Seiichi, Shibahara, Kentaro, Yokoyama, Shin, Iwata, Atsushi, Ae, Tadashi, Hirose, Masataka

Journal:

Japanese Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 623 KB

english, 1996

6

[IEEE 2007 International Workshop on Junction Technology - Kyoto, Japan (2007.06.8-2007.06.9)] 2007 International Workshop on Junction Technology - Dual-Pearson Parameter Extraction for In Tilt Implantation

Shibahara, Kentaro, Eto, Takanori, Fukunaga, Tetuya

Year:

2007

Language:

english

File:

PDF, 1.89 MB

english, 2007

7

Sheet Resistance Reduction and Crystallinity Improvement in Ultrashallow n + /p Junctions by Heat-Assisted Excimer Laser Annealing

Kurobe, Ken-ichi, Ishikawa, Yoshinori, Shibahara, Kentaro

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 147 KB

english, 2005

8

Dopant Loss Origins of Low Energy Implanted Arsenic and Antimony for Ultra Shallow Junction Formation

Shibahara, Kentaro, Furumoto, Hiroaki, Egusa, Kazuhiko, Koh, Meishoku, Yokoyama, Shin

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 725 KB

english, 1998

9

Interface properties and effective work function of Sb-predoped fully silicided NiSi gate

Takuji Hosoi, Kosuke Sano, Akio Ohta, Katsunori Makihara, Hirotaka Kaku, Seiichi Miyazaki, Kentaro Shibahara

Journal:

Surface and Interface Analysis

Year:

2008

Language:

english

File:

PDF, 447 KB

english, 2008

10

Cost-Effectiveness of Transcatheter Aortic Valve Implantation Using a Balloon-Expandable Valve in Japan: Experience From the Japanese Pilot Health Technology Assessment

Inoue, Sachie, Nakao, Koichi, Hanyu, Michiya, Hayashida, Kentaro, Shibahara, Hidetoshi, Kobayashi, Makoto, Asaoka, Miyoshi, Nishikawa, Kazuhiko, Clancy, Seth, Koshiishi, Jun, Sakamaki, Hiroyuki

Journal:

Value in Health Regional Issues

Year:

2020

File:

PDF, 1.23 MB

2020

11

Degradation in a Molybdenum-Gate MOS Structure Caused by N+ Ion Implantation for Work Function Control

Amada, Takaaki, Maeda, Nobuhide, Shibahara, Kentaro

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 728 KB

english, 2002

12

CD44 variant–dependent regulation of redox balance in EGFR mutation–positive non–small cell lung cancer: A target for treatment

Kawano, Yuko, Iwama, Eiji, Tsuchihashi, Kenji, Shibahara, Daisuke, Harada, Taishi, Tanaka, Kentaro, Nagano, Osamu, Saya, Hideyuki, Nakanishi, Yoichi, Okamoto, Isamu

Journal:

Year:

2017

Language:

english

File:

PDF, 823 KB

english, 2017

13

Synthesis and characterization of 8-quinolinolato vanadium(IV) complexes

Kentaro Takano, Yukinari Sunatsuki, Masaaki Kojima, Isamu Kinoshita, Takashi Shibahara

Journal:

Inorganica Chimica Acta

Year:

2009

Language:

english

File:

PDF, 765 KB

english, 2009

14

Imaging of hypoxic lesions in patients with gliomas by using positron emission tomography with 1-(2-[ 18 F] fluoro-1-[hydroxymethyl]ethoxy)methyl-2-nitroimidazole, a new 18 F-labeled 2-nitroimidazole analog

Shibahara, Ichiyo, Kumabe, Toshihiro, Kanamori, Masayuki, Saito, Ryuta, Sonoda, Yukihiko, Watanabe, Mika, Iwata, Ren, Higano, Shuichi, Takanami, Kentaro, Takai, Yoshihiro, Tominaga, Teiji

Journal:

Journal of Neurosurgery

Year:

2010

Language:

english

File:

PDF, 13.90 MB

english, 2010

15

Heteroepitaxial Growth of Antiphase-Boundary Free Cubic Sic(100) Single Crystals on Si(100)

Shibahara, Kentaro, Nishino, Shigehiro, Matsunami, Hiroyuki

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 1.92 MB

english, 1987

16

Fluorescent Tin(IV) Complexes with Schiff Base Ligands

Takano, Kentaro, Shibahara, Takashi

Journal:

Chemistry Letters

Year:

2008

Language:

english

File:

PDF, 85 KB

english, 2008

17

Merits and demerits of light absorbers for ultra-shallow junction formation by green laser annealing

Akira Matsuno, Eisuke Takii, Takanori Eto, Ken-ichi Kurobe, Kentaro Shibahara

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2005

Language:

english

File:

PDF, 222 KB

english, 2005

18

Reaction of Sulfur and Oxygen-Bridged 8-Quinolinolato Trinuclear Molybdenum Cluster [Mo3OS3(qn)3(H2O)3]+with Acetylene Carboxylic Acids

Kentaro Takano, Hideki Kawasaki, Genta Sakane, Takashi Shibahara

Journal:

Journal of Cluster Science

Year:

2007

Language:

english

File:

PDF, 419 KB

english, 2007

19

Formation Kinetics and Work Function Tuning of Pd 2 Si Fully Silicided Metal Gate

Hosoi, Takuji, Sano, Kosuke, Hosawa, Kosei, Shibahara, Kentaro

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 377 KB

english, 2007

20

Fluorescent Tin(IV) Complexes with Schiff Base Ligands: Synthesis, Structures, and Fluorescence Lifetime

Takano, Kentaro, Takahashi, Masayuki, Fukushima, Takaaki, Takezaki, Makoto, Tominaga, Toshihiro, Akashi, Haruo, Takagi, Hideaki, Shibahara, Takashi

Journal:

Bulletin of the Chemical Society of Japan

Year:

2012

Language:

english

File:

PDF, 3.41 MB

english, 2012

21

[IEEE 2009 International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2009.06.11-2009.06.12)] 2009 International Workshop on Junction Technology - Influence of amorphization depth on sheet resistance in shallow junction formation with B cluster implantation

Yoji Kawasaki,, Yoshiki Maruyama,, Hidefumi Yoshimura,, Hiroshi Miyatake,, Kentaro Shibahara,

Year:

2009

Language:

english

File:

PDF, 440 KB

english, 2009

22

High-Rate GaAs Epitaxial Lift-Off Technique for Optoelectronic Integrated Circuits

Maeda, Jun-ichi, Sasaki, Yasushi, Dietz, Nikolaus, Shibahara, Kentaro, Yokoyama, Shin, Miyazaki, Seiichi, Hirose, Masataka

Journal:

Japanese Journal of Applied Physics

Year:

1997

File:

PDF, 822 KB

1997

23

Plasma Etching of CVD Grown Cubic SiC Single Crystals

Dohmae, Shinichi, Shibahara, Kentaro, Nishino, Shigehiro, Matsunami, Hiroyuki

Journal:

Japanese Journal of Applied Physics

Year:

1985

File:

PDF, 441 KB

1985

24

Surface morphology of cubic SiC(100) grown on Si(100) by chemical vapor deposition

Kentaro Shibahara, Shigehiro Nishino, Hiroyuki Matsunami

Journal:

Journal of Crystal Growth

Year:

1986

Language:

english

File:

PDF, 736 KB

english, 1986

25

[IEEE 2006 International Symposium on VLSI Technology, Systems, and Applications - Hsinchu, Taiwan (2006.4.24-2006.4.24)] 2006 International Symposium on VLSI Technology, Systems, and Applications - Metal Gate Technology for 45nm and Beyond

Shibahara, Kentaro

Year:

2006

Language:

english

File:

PDF, 2.41 MB

english, 2006

26

[IEEE 2006 International Symposium on VLSI Technology, Systems, and Applications - Hsinchu, Taiwan (2006.4.24-2006.4.24)] 2006 International Symposium on VLSI Technology, Systems, and Applications - Mo Gate Deformation Induced by Laser Annealing Process

Shibahara, Kentaro, Matsuno, Akira, Hino, Masaki, Kurobe, Ken-ichi

Year:

2006

Language:

english

File:

PDF, 2.25 MB

english, 2006

27

Expression of brain-derived neurotrophic factor and its receptor TrkB is associated with poor prognosis and a malignant phenotype in small cell lung cancer

Kimura, Shinichi, Harada, Taishi, Ijichi, Kayo, Tanaka, Kentaro, Renpeng, Liu, Shibahara, Daisuke, Kawano, Yuko, Otsubo, Kohei, Yoneshima, Yasuto, Iwama, Eiji, Nakanishi, Yoichi, Okamoto, Isamu

Journal:

Year:

2018

Language:

english

File:

PDF, 1.19 MB

english, 2018

28

Intrinsic and Extrinsic Regulation of PD-L2 Expression in Oncogene-Driven Non–Small Cell Lung Cancer

Shibahara, Daisuke, Tanaka, Kentaro, Iwama, Eiji, Kubo, Naoki, Ota, Keiichi, Azuma, Koichi, Harada, Taishi, Fujita, Jiro, Nakanishi, Yoichi, Okamoto, Isamu

Journal:

Journal of Thoracic Oncology

Year:

2018

Language:

english

File:

PDF, 878 KB

english, 2018

29

Estimation of Nitrogen Ion Energy in Sterilization Technology by Plasma Based Ion Implantation

KONDOU, Youhei, NAKASHIMA, Takeru, TANAKA, Takeshi, TAKAGI, Toshinori, WATANABE, Satoshi, OHKURA, Kensaku, SHIBAHARA, Kentaro, YOKOYAMA, Shin

Journal:

Year:

2005

File:

PDF, 579 KB

2005

30

Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy

Shin Yokoyama, Hiroshi Goto, Takahiro Miyamoto, Norihiko Ikeda, Kentaro Shibahara

Journal:

Applied Surface Science

Year:

1997

File:

PDF, 434 KB

1997

31

Accuracy of Secondary Ion Mass Spectrometry Depth Profiling for Sub-keV As+ Implantation

Eto, Takanori, Shibahara, Kentaro

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 236 KB

english, 2005

32

Ultra-Shallow Junction Formation by Green-Laser Annealing with Light Absorber

Takii, Eisuke, Eto, Takanori, Kurobe, Ken-ichi, Shibahara, Kentaro

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 150 KB

english, 2005

33

Quantitative Evaluation of Dopant Loss in 5–10 keV As Ion Implantation for Low-Resistive, Ultrashallow Source/Drain Formation

Koh, Meishoku, Egusa, Kazuhiko, Furumoto, Hiroaki, Shirakata, Toru, Seo, Eisuke, Shibahara, Kentaro, Yokoyama, Shin, Hirose, Masataka

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 137 KB

english, 1999

34

4-Nitro-6-[(8-quinolylamino)methylidene]cyclohexa-2,4-dien-1-one

Shibahara, Takashi, Takano, Kentaro, Takahashi, Masayuki, Yamasaki, Mikio

Journal:

Acta Crystallographica Section E Structure Reports Online

Year:

2010

Language:

english

File:

PDF, 683 KB

english, 2010

35

Effect of Pulse Duration on Formation of Ultrashallow Junction by Excimer Laser Annealing

Matsuno, Akira, Shibahara, Kentaro

Journal:

Japanese Journal of Applied Physics

Year:

2006

File:

PDF, 569 KB

2006

36

Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch

Nakamura, Shingo, Itano, Mitsushi, Aoyama, Hirokazu, Shibahara, Kentaro, Yokoyama, Shin, Hirose, Masataka

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 226 KB

english, 2003

37

Phosphorus-Assisted Low-Energy Arsenic Implantation Technology for N-Channel Metal–Oxide–Semiconductor Field-Effect Transistor Source/Drain Formation Process

Imai, Kiyotaka, Shishiguchi, Seiichi, Shibahara, Kentaro, Yokoyama, Shin

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 200 KB

english, 2003

38

High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips

Namba, Tohru, Uehara, Akihito, Doi, Takeshi, Nagata, Takahiko, Kuroda, Yasuhide, Miyazaki, Seiichi, Shibahara, Kentaro, Yokoyama, Shin, Iwata, Atushi, Hirose, Masataka

Journal:

Japanese Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 838 KB

english, 1996

39

[AIP U.S.-Japan workshop on ion temperature gradient-driven turbulent transport - Austin, Texas (USA) (Jan 1993)] AIP Conference Proceedings - Point vortex dynamics in a magnetized plasma

Kono, Mitsuo, Shibahara, Hideaki, Yabuki, Kentaro

Year:

1994

Language:

english

File:

PDF, 1.18 MB

english, 1994

40

Electrical Properties of Undoped and Ion-Implanted Cubic SiC Grown on Si(100) by Chemical Vapor Deposition

Shibahara, Kentaro, Takeuchi, Tatsuya, Nishino, Shigehiro, Matsunami, Hiroyuki

Journal:

Japanese Journal of Applied Physics

Year:

1989

File:

PDF, 1.47 MB

1989

41

Workfunction Tuning Using Various Impurities for Fully Silicided NiSi Gate

Sano, Kousuke, Hino, Masaki, Ooishi, Norihiro, Shibahara, Kentaro

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 806 KB

english, 2005

42

Effects of Si/Ni Composition Ratio of Ni x Si y Gate Electrode and Hf/Si Composition Ratio of Hf-Based High- k Insulator on Threshold Voltage Controllability and Mobility of Metal–Oxide–Semiconductor Field-Effect Transistors

Terai, Masayuki, Hase, Takashi, Shibahara, Kentaro, Watanabe, Hirohito

Journal:

Japanese Journal of Applied Physics

Year:

2010

File:

PDF, 255 KB

2010

43

First isolation of Schizophyllum commune in a harbor seal ( Phoca vitulina )

Hanafusa, Yasuko, Hirano, Yuzo, Watabe, Hirofumi, Hosaka, Kentaro, Ikezawa, Mitsutaka, Shibahara, Tomoyuki

Journal:

Medical Mycology

Year:

2016

Language:

english

File:

PDF, 1.32 MB

english, 2016

44

Sensitivity of epidermal growth factor receptor with single or double uncommon mutations to afatinib confirmed by a visual assay

Kimura, Shinichi, Tanaka, Kentaro, Harada, Taishi, Liu, Renpeng, Shibahara, Daisuke, Kawano, Yuko, Nakanishi, Yoichi, Okamoto, Isamu

Journal:

Year:

2018

Language:

english

File:

PDF, 831 KB

english, 2018

45

Improvement in Antimony-Doped Ultrashallow Junction Sheet Resistance by Dopant Pileup Reduction at the SiO 2 /Si Interface

Shibahara, Kentaro, Egusa, Kazuhiko, Kamesaki, Koji, Furumoto, Hiroaki

Journal:

Japanese Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 176 KB

english, 2000

46

Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors

Khosru, Quazi Deen Mohd, Yokoyama, Shin, Nakajima, Anri, Shibahara, Kentaro, Kikkawa, Takamaro, Sunami, Hideo, Yoshino, Takenobu

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 335 KB

english, 2003

47

Calculation of Electrical Properties of Novel Double-Barrier Metal Oxide Semiconductor Transistors

Hatano, Tsuyoshi, Nomura, Akihiro, Yoshida, Masayoshi, Nakajima, Anri, Shibahara, Kentaro, Yokoyama, Shin

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 107 KB

english, 1999

48

Possible Roles of Periostin in the Formation of Hemodialysis Vascular Access Stenosis after Polytetrafluoroethylene Graft Implantation in Dogs

Watase, Kenji, Jin, Denan, Terai, Kentaro, Kanemiya, Taketoshi, Nakakura, Hyogo, Shibahara, Nobuhisa, Arima, Shuji, Takai, Shinji

Journal:

International Journal of Molecular Sciences

Year:

2020

File:

PDF, 22.14 MB

2020

49

Atomic layer controlled deposition of silicon nitride with self-limiting mechanism

Goto, Hiroshi, Shibahara, Kentaro, Yokoyama, Shin

Journal:

Applied Physics Letters

Year:

1996

Language:

english

File:

PDF, 397 KB

english, 1996

50

Antimony Clustering due to High-dose Implantation

Shibahara, Kentaro, Onimatsu, Dai

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 451 KB

english, 2000

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